MEMS Components for NMR Atomic Sensors

This paper introduces a batch fabrication method to manufacture micro-electromechanical system (MEMS) components for nuclear magnetic resonance (NMR) atomic sensors, such as NMR gyroscope (NMRG) and NMR magnetometer (NMRM). The components presented are: 1) micro-coils generating the magnetic field with the magnetic field homogeneity of H = 354 ppm; 2) spherical micro-fabricated atomic cells confin...