Charge-state related effects in sputtering of LiF by swift heavy ions

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms(2017)

引用 19|浏览12
暂无评分
摘要
Sputtering experiments with swift heavy ions in the electronic energy loss regime were performed by using the catcher technique in combination with elastic recoil detection analysis. The angular distribution of particles sputtered from the surface of LiF single crystals is composed of a jet-like peak superimposed on a broad isotropic distribution. By using incident ions of fixed energy but different charges states, the influence of the electronic energy loss on both components is probed. We find indications that isotropic sputtering originates from near-surface layers, whereas the jet component may be affected by contributions from depth up to about 150nm.
更多
查看译文
关键词
Electronic energy loss,Sputtering,LiF,Jet component
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要