An Ultra-Slow-Wave Transmission Line On Cmos Technology

In this letter, utilizing multimetal layers in the CMOS process, an ultra-slow-wave on-chip coplanar waveguide (CPW) transmission line with interdigital loaded stubs and floating strips is proposed. From the full-wave 3D EM simulation and measurement results, it is found that the proposed on-chip transmission line features smaller size and lower loss comparing to traditional on-chip CPW transmission lines. (C) 2017 Wiley Periodicals, Inc.