High-Damped Accelerometer Based On Squeeze-Film Damping And Piezoresistive Nanogauge Detection For Vibrating Environments
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)(2017)
摘要
This paper reports the conception, the fabrication and the electrical testing of an overdamped silicon accelerometer dedicated to vibrating environments. Squeeze-film damping effects are implemented to drastically reduce the mechanical component bandwidth while keeping a satisfactory resolution. Mechanical filtering of vibrations above 3 Hz is expected to strongly lower the mechanical overcharge and the fatigue of the structure that may occur when the MEMS is exposed to large parasitic vibrations and shocks. Such a low-pass system has not been reported yet, to the best of our knowledge.
更多查看译文
关键词
MEMS accelerometer,squeeze-film damping,piezoresistive detection
AI 理解论文
溯源树
样例
生成溯源树,研究论文发展脉络
Chat Paper
正在生成论文摘要