CRMA: Incorporating Cut Redistribution With Mask Assignment to Enable the Fabrication of 1-D Gridded Design.

1-D gridded design is one of the most promising solutions that can enable the scaling to 10 nm technology node and beyond. Line-end cuts are needed to fabricate 1-D layouts, where two techniques are available to resolve the conflicts between cuts: 1) cut redistribution and 2) cut mask assignment. In this paper, we consider incorporating the two techniques to enable the manufacturing of cut pattern...