Low-Loss Si3N4 TriPleX Optical Waveguides: Technology and Applications Overview

IEEE Journal of Selected Topics in Quantum Electronics(2018)

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摘要
An overview of the most recent developments and improvements to the low-loss TriPleX Si3N4 waveguide technology is presented in this paper. The TriPleX platform provides a suite of waveguide geometries (box, double stripe, symmetric single stripe, and asymmetric double stripe) that can be combined to design complex functional circuits, but more important are manufactured in a single monolithic pro...
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关键词
Geometry,Silicon,Optical fibers,Optical device fabrication,Optical filters
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