Capacitive biosensor based on vertically paired electrode with controlled parasitic capacitance

•Two types of vertically paired electrodes with controlled parasitic capacitance was developed.•The influence of parasitic capacitance was estimated for capacitive measurement on protein adsorption.•Finite element method simulation was used for studying of the influence of parasitic capacitance on the sensitivity of impedance measurement.•Immunoassay was presented on two types of vertically paired electrodes with controlled parasitic capacitance.