CMOS-Compatible Contacts for Si Photonics from Solid-State Reaction to Laser Integration

E. Ghegin,S. Zhiou,S. Bensalem, L. Toselli,M. Pasquali,S. Favier,C. Jany, B. Szelag,P. Gergaud,F. Nemouchi,Ph. Rodriguez

2018 IEEE International Interconnect Technology Conference (IITC)（2018）

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摘要

From surface preparation and solid-state reaction to laser integration, a short overview of the CMOS-compatible contacts developed in our group on n-InP and p-InGaAs for Si photonic applications is proposed.

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关键词

Contacts,InP,InGaAs,integration,Si Photonics

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