X-Ray Optics: 3D Nanofabrication of High-Resolution Multilayer Fresnel Zone Plates (Adv. Sci. 9/2018)

In article 1800346, Umut Tunca Sanli, Kahraman Keskinbora, and co-workers fabricate multilayer Fresnel zone plate (ML-FZP) type X-ray lenses on optical fibers by depositing several hundred alternating layers of oxide super-structures. 15 nm wide structures of a test object are resolved using the built X-ray lenses. Moreover, a plasma focused ion beam is used for preparing micro-pillar arrays with precise tapering angles enabling ML-FZPs with zones precisely tilted to the Bragg angle.