High-performance fully transparent Al–Sn–Zn–O thin-film transistors using double-channel structures

Junchen Dong,Shengdong Zhang,Dedong Han,Yi Wang,Xing Zhang,Yingying Cong,Guodong Cui,Xiaomi Zhang,Wen Yu

Electronics Letters（2016）

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摘要

We successfully fabricated the fully transparent Al-Sn-Zn-O thin-film transistors (ATZO TFTs) on glass by RF magnetron sputtering, and then the electrical performances of the ATZO TFTs are optimized with double-channel structures. The double-channel structures are formed by using bilayer ATZO films fabricated successively with different oxygen partial pressure in the sputtering process. The operat...

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关键词

aluminium compounds,semiconductor materials,semiconductor thin films,sputter deposition,thin film transistors,tin compounds,zinc compounds

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