Fabrication of superconductor–ferromagnet–insulator–superconductor Josephson junctions with critical current uniformity applicable to integrated circuits

Nb Josephson junctions (JJs) were fabricated with a Pd89Ni11 ferromagnetic interlayer and an AlOx tunnel barrier layer for use in large-scale superconducting integrated circuits. The junctions had a small critical current (I-c) spread, where the standard deviation 1 sigma was less than 2% at 4.2K for junctions with the same designed size. It was observed that the electrical behavior of the junctions could be controlled by manipulating the film thickness of the PdNi interlayer. The junctions behaved as a pi-JJ for thicknesses of 9 and 11 nm, showing 1 sigma in the I-c spread of 1.2% for 9 nm. (C) 2017 The Japan Society of Applied Physics.