Atomic-Scale Nanofacet Structure In Semipolar (20(2)Over-Bar1) And (20(2)Over-Bar1) Ingan Single Quantum Wells

Transmission electron microscopy studies showed that these nanofacets were mainly composed of (10 (1) over bar0), (10 (1) over bar1), (10 (1) over bar1) planes, which led to significant fluctuations in QW thickness. Atom probe tomography studies were carried out to visualize the nanofacet structure. The In composition in the In(x)G(a1-x)N alloys followed a binominal distribution despite the formation of the nanofacet structure. One- dimensional (1D) Schrodinger-Poisson drift-diffusion simulation showed that these nanofacets and associated QW thickness fluctuations will lead to a large wavelength shift and a broadened spectral linewidth for semipolar QWs. (C) 2014 The Japan Society of Applied Physics