Reference Data Simulation for L∞ Fitting of Aspheres

In the field of dimensional metrology of optical components, fitting algorithms play an essential role. Performing data fitting according to L∞-norm indicates about form errors since it directly minimizes peak-to-valley (PV). In parallel, reference data (softgauges) are used to assess the performance of the developed algorithms and must incorporate multiple parameters related to points distribution, manufacturing process and measurement errors, to be as close as possible to the real measured data. In this paper, a developed algorithm for surface fitting based on L∞-norm is presented and tested on simulated reference data of aspheres.