GaN distributed bragg reflector cavity for sensing applications

S. Jia,E. D. Le Boulbar,Krishna C. Balram,Jonathan R. Pugh,Tao Wang,Duncan W. E. Allsopp,Philip A. Shields,Martin J Cryan

Frontiers in Optics（2018）

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摘要

GaN grating couplers and a distributed Bragg reflector cavity are fabricated using displacement Talbot lithography on GaN-on-sapphire. Cavity resonances are simulated and measured for two devices with Q factors of ~200.

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