CHARACTERISTICS OF INDUCTIVELY COUPLED PLASMA IN DIFFERENT POWER AND PRESSURE

A tow-dimensional axisymmetric inductively coupled plasma (ICP) model, and its implementation in the COMSOL multiphysical software are described in this paper. An ICP generator filled with argon is simulated in this study. The number density and temperature of electrons are obtained in different power and pressure. Then the profile comparison of the electron number density and temperature with respect to different power and pressure are illustrated. Finally, the simulation results are compared with the experimental results, to verify the veracity of two-dimensional fluid model, and the simulated results of the number density and temperature of electrons are approximately agreement with the experimental results. The reason for this difference would be the Maxwellian electron energy distribution function(EEDF) assumption and the lack of the cross sections of collisions and the reaction rates.