An adhesive bonding approach by hydrogen silsesquioxane for silicon carbide-based LED applications

Materials Science in Semiconductor Processing(2019)

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摘要
We report an adhesive bonding approach using hydrogen silsesquioxane (HSQ) for silicon carbide (SiC) samples. A hybrid light-emitting diode (LED) was successfully fabricated through bonding a near-ultraviolet (NUV) LED grown on a commercial 4H-SiC substrate to a free-standing boron-nitrogen co-doped fluorescent-SiC epi-layer. The bonding quality and the electrical performance of the hybrid LED device were characterized. Neither voids nor defects were observed which indicates a good bonding quality of the proposed HSQ approach. A strong warm white emission was successfully obtained from the hybrid LED through an electric current injection of 30 mA.
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关键词
Hydrogen silsesquioxane bonding,Fluorescent-silicon carbide,Warm white light-emitting diodes
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