Multifactor lithographic process conditions of 3D single mode waveguide fabrication

•Zirconium is the most suitable host for active waveguides because of its properties.•Trimethoxysilylpropylmethacrylate (TMSPM) allows low temperature sol-gel processing.•Preheat and post-bake are important for 3D single mode waveguide fabrication.•The single mode waveguide can be fabricated with single step spin coating.•The final sol gel waveguide quality is sensitive to heat treatment.