Highly Transparency and High Mobility Bilayer Aluminum Doped Zinc Oxide Films on Periodic Textured Glass Morphology for Thin Film Silicon Solar Cells

We reported the influence on the relationship between the working pressure and the sputtering power regarding Al-doped ZnO (AZO) films deposition conditions. All deposited AZO samples were better than that of SnO2:F (FTO) sample regarding the transmittance. Carrier mobility was maximized around at the low sputtering power (150 W) and high working pressure (12 mTorr). We prepared to make the multi-scale architecture on a textured glass substrate for thin film silicon solar cell application and achieved high transmittance around 85.8% and high haze ratio values about 61.5% at honeycomb (HC) textured glass/bilayer AZO films. HC textured glass/bilayer AZO samples are also obtained around 6 ohm/sq sheet resistance regardless of any condition.