Heterogeneously Integrated Resonant Waveguide Grating Structure On Magneto-Active Elastomeric Sponge
MICROWAVE AND OPTICAL TECHNOLOGY LETTERS(2019)
Abstract
In this article, we employ thin-film resonant waveguide grating structure on magneto-active elastomeric sponge using a delamination-assisted transfer process. Periodic nanostructured polymer layer was successfully separated from its host substrate and transferred onto a spongy elastomeric structure embedded with magnetic nanoparticles as a magneto-optical sensor. The fabricated magnetic sensor shows potential sensing enhancement from optical resonance characteristics. Based on a post-integration scheme, the presented approach can be applied to various nonplanar structures, which opens new avenues for low-cost novel sensing applications.
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Key words
heterogeneous integration, magnetic field sensor, magneto-active elastomer, photonic sensor, resonant waveguide grating
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