High acceleration and angular velocity micro vibrating platform with IMU integration

Feng Qin,Xiangyu Sun,Tingting Yang,Dongdong Gong,Yicheng Wang,Yu Chen,Xiaoshi Li,Gang Dai,Jingfu Bao,Yijia Du

Sensors and Actuators A: Physical（2019）

引用 4|浏览8

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摘要

A PZT film based micro vibrating platform fabricated by wafer-layer process to provide high acceleration and angular velocity for IMU self-calibration.

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关键词

Micro vibrating platform,High acceleration,Wafer-level fabrication,IMU integration

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