Sub-Terahertz Testing of Millimeter Wave Monolithic and Very Large Scale Integrated Circuits

•THz testing of MMICs and VLSI circuits could be done by measuring the response at the pins.•This technique could be used to evaluate the reliability and lifetime of integrated circuits.•It was demonstrated using a working and damaged MMIC with just a few transistor.•This technique can use machine learning for establishing the evolving database of the responses.