Hybrid III-V/Silicon technology for laser integration on a 200 mm fully CMOS-compatible silicon photonics platform

Bertrand Szelag,Karim Hassan,Laetitia Adelmini,Elodie Ghegin,Philippe Rodriguez,Fabrice Nemouchi,Pierre Brianceau,Antoine Schembri,David Carrara,Pierrick Cavalie, Florent Franchin, Marie-Christine Roure,Loic Sanchez,Christophe Jany,Segolene Olivier

IEEE Journal of Selected Topics in Quantum Electronics（2019）

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摘要

In this paper, we present the hybrid III-V/Si photonic platform developed in CEA-LETI. The overall integration is done in a fully CMOS compatible 200-mm technology, scalable to 300-mm wafers, leveraging the large-scale integration capabilities of silicon photonics. III-V material is integrated on top of a mature silicon photonic front-end wafer through direct molecular bonding enabling the monolit...

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关键词

Silicon,Photonics,Lasers,Bonding,Waveguide lasers,Optical waveguides

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