A Symmetry Flexure Structure And Its Application In Micro/Nano Newton Force Generation

Micro/nano force measurement is an important topic in micro/nano manufacturing and manipulation. A symmetry flexure structure and its application in micro/nano Newton force generation is presented in this paper. Based on the electromagnetic actuator, a novel mechanical system for micro/nano Newton force generation is designed. The system mainly includes the flexure suspension mechanism, the Lorentz force actuator and the displacement sensor. The stiffness of thin beams is calculated and the Lorentz force is theoretically modeled. And then, the suspension mechanism is simulated by Finite Element Analysis (FEA). According to the analysis results, the stiffness of the flexure suspension mechanism is 37.48 N/m, which matches the simulation results well.