Hyperspectral Microscopy With Broadband Infrared Frequency Combs

Henry Timmers,Abijith Kowligy,Alexander J. Lind,Nima Nader,Jonah Shaw,Dobryna Zalvidea,Jens Biegert,Scott A. Diddams

2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2019）

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摘要

We present a new modality for infrared, hyperspectral microscopy using dual-comb, electro-optic sampling of octave-spanning infrared frequency combs. We obtain hyperspectral images of SU8 test patterns on Si wafers with a spatial resolution of 12 mu m. (C) 2019 The Author(s)

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关键词

octave-spanning infrared frequency combs,hyperspectral images,SU8 test patterns,hyperspectral microscopy,broadband infrared frequency combs,infrared microscopy,dual-comb,electro-optic sampling,Si wafers,Si

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