Modelling Of Damping Characteristics In Silicon-Gold Bilayer Cantilevers

V. Chenniappan,K.K.M.B.D. Silva,G.A. Umana-Membreno,M. Martyniuk,A. Keating,J.M. Dell, L. Faraone

2018 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAD)（2018）

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摘要

This paper presents a simple method to extract the damping ratio of bilayer cantilevers using the static deflection profile of the released cantilevers. The extracted damping ratio is used to build a second order dynamical model of the cantilever. The model is validated by comparing the measured step response with the response predicted by the second order dynamical model.

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关键词

silicon-gold bilayer cantilevers,static deflection profile,released cantilevers,cantilever,measured step response,damping ratio,second order dynamical model

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