Direct integration of piezoactuator array with active-matrix oxide thin-film transistors using a low-temperature solution process

•A feasible solution-based process using the UV/O3 assisted annealing for fabricating PZT films at a temperature (<450 °C) was developed.•Direct integration of PZT actuator array on an active-matrix oxide TFT was demonstrated without any bonding or transferring process.•The integrated actuator array can be totally made by using the solution-based processes which potentially reduces the fabrication cost.