PtSi Contact Metallurgy Using Sputtered Pt and Different Annealing Processes.Chinan Chang,A. Segmueller,H.-C. W. Huang,B. Cunningham,F. E. Turene,A. Sugerman,P. A. TottaJOURNAL OF THE ELECTROCHEMICAL SOCIETY(1986)引用 14|浏览1暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要