Continuous control of microlens morphology on Si based on the polarization-dependent femtosecond laser induced periodic surface structures modulation

Weina Han,Zihao Han,Yanping Yuan,Shaojun Wang,Xiaowei Li,Furong Liu

Optics & Laser Technology（2019）

引用 10|浏览7

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摘要

•Linearly polarized femtosecond laser induces directional SPPs scattering effect.•Morphology of ripples can be modulated by directional SPPs scattering effect.•Microlens morphologies modulation based on surface structure control.

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关键词

Femtosecond laser,Laser induced periodic surface structures,Microlens array,Surface plasmon polaritons,Laser polarization

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