Oscillation in Coupled Resonator Systems: Part V - Exploratory Study on Separate Detection of Two Kinds of Perturbations

SYMPOSIUM ON DESIGN, TEST, INTEGRATION & PACKAGING OF MEMS AND MOEMS (DTIP 2019)(2019)

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摘要
A coupled cantilever system, consisting of a low-frequency and a high-frequency cantilever was reported in DTIP2012 to study the synchronized region. While the doubled frequency response by the super-harmonic oscillation, the optimization of polymer-based synchronized structures, and SNR enhancement by internal resonance were demonstrated in DTIP2013, DTIP 2016 and DTIP2018 respectively. In this paper, we explore separate detection of two kinds of perturbations in coupled resonator system for the first time. Two cantilevers with a frequency ratio of 1:3 are coupled through an overhang. The low-frequency cantilever used for sensing is driven around its resonant frequency. The triple response is observed in the high-frequency cantilever used for detecting. The proposed oscillation system, not only enables frequency shift multiplication, but also accomplishes separate detection of two kinds of perturbations due to their different variation laws of vibration characteristics.
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关键词
coupled resonator system,separate detection,two kinds of perturbations,different variation laws,high sensitivity
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