Characterization of Silicon Photonics Modulator Integration and High Efficiency Testing Platform

Po-Chih Chang,Shang-Chun Chen,Ting-Hui Chen, Wei-Yen Chen, Chih-Hsiang Hsu,Chien-Ying Huang, Kai-Ning Ku,Ming-Chang Lee, Tai-Hsin Lee,Chen-Yu Lin,Chien-Chung Lin,Chung-Chih Wang,Sin-Jhu Wun,Jie Zhang

international conference on group iv photonics（2019）

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摘要

We successfully establish a silicon photonics device manufacturing and testing platform in 200mm SOI wafer. We integrate modulator and driver chip to show 30Gb/s PAM4 capability. A fully-automatic wafer level characterization process is built up for all optical devices in surface coupling method.

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关键词

silicon photonics, modulator, wafer level measurement

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