A Microfluidic MEMS-Microbalance Platform with Minimized Acoustic Radiation in Liquid.

Hakhamanesh Mansoorzare,Sarah Shahraini,Ankesh Todi,Nilab Azim, Darina Khater,Swaminathan Rajaraman,Reza Abdolvand

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control（2020）

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摘要

In this article, the microfluidic channels that deliver liquid to a microscale thin-film piezoelectric-onsilicon (TPoS) gravimetric resonant sensor are incorporated into the backside of the silicon-on-insulator (SOI) wafer on which the resonator is fabricated. Specifically, a microwell is embedded at the bottom of the disk -shaped TPoS resonator, while a very thin layer of parylene covering the ba...

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Liquids,Acoustics,Resonant frequency,Optical resonators,Electrodes,Sensors,Table lookup

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