Atomic data for low temperature mid-Z elements for lithography applicationsAmanda Neukirch,David P. Kilcrease,Peter Hakel,Christopher J. Fontes,Manolo Sherrill,James ColganBulletin of the American Physical Society(2019)引用 23|浏览10暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要