A titanium-nickel composite mold with low surface energy for thermal nanoimprint lithography

Xinxin Fu, Wenting Yang,Mengjia He,Yang Li,Zongbin Hao,Yuting He,Changsheng Yuan,Yushuang Cui,Haixiong Ge

Materials Letters（2020）

引用 4|浏览7

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摘要

•A nickel mold with titanium as the surface is fabricated by electroplating.•A covalent bond between fluorinated trichlorosilane and titanium is formed.•After surface modification, the mold presents a low surface energy state.

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关键词

Nanoimprint lithography,Mold,Electrodeposition,Adhesion,Self-assembled monolayer

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