Damage formation and recovery in Nd:CNGG crystal by carbon ion implantation

The formation of damage in neodymium doped calcium niobate gallium garnet was investigated after irradiation with 100 keV and 6 MeV C ions at room temperature. The damage was quantified by means of Rutherford backscattering spectrometry in channelling configuration (RBS/C). In order to cope with the superposition of the signal from Nb, Ga and Ca atoms, a special procedure was developed to reconstruct RBS/C spectra yielding the depth distribution of damage. For 6 MeV C ions, the high electronic energy loss of the ions significantly contributes to damage formation. In the nuclear regime, at low ion fluences, point defects are produced. Nucleation and growth of a second type of damage finally results in an amorphous layer. The final damage state is stable up to 600 °C. At 700 °C part of the implanted layer recrystallizes. Annealing at 800 °C decreases the remaining damage concentration from 100% to about 70%.