Design and Fabrication of PVA-Based Relative Humidity Sensors Using Thick Film Technology
2019 International Symposium on Electronics and Smart Devices (ISESD)(2019)
摘要
This paper discusses the design and fabrication of relative humidity sensors with Polyvinyl Alcohol (PVA) as a sensing layer using thick film technology. The design is optimized to produce the ideal geometry according to the limits of thick film technology. The sensor fabrication process uses a screen printing technique on an Alumina (Al
2
O
3
) substrate with AgAl as a material for its conductor path. PVA deposition as a sensing layer is done by the spin coating method. Sensor fabrication test results are carried out by varying the 4 humidity points in the chamber with the hygrometer as a reference. Based on the test results it is known that the sensor shows a response to humidity in the form of a resistance value, if the environment around the sensor is more humid, the resistance will decrease. The relatively high value of PVA-based humidity sensor resistance can be reduced by mixing PVA with metal oxide in this study using SnO
2
.
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关键词
Relative Humidity Sensor,Thick film technology,screen printing,PVA,resistance
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