Capacitive Sensing and Electrostatic Control System Design and Analysis With a Torsion Pendulum.

The micro capacitive sensing and electrostatic drive control system (front-end electronics, FEE) is the core component of inertial sensor in space gravitational wave detection. The FEE requires high-precision displacement detection, high-stability electrostatic drive, and stable system control to achieve an acceleration resolution of 10-15 m/s2/Hz1/2 in the low-frequency range of 0.1 mHz-1 Hz. Bas...