On-machine calibration of angular position and runout of a precision rotation stage using two absolute position sensors

Measurement(2020)

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摘要
•A precision rotation stage was calibrated using two absolute position sensors.•Angular position and runout of a rotation stage could be obtained simultaneously.•The calibrated angular positions agreed with the reference values within ±1″.•The runout was measured with the repeatability of 80 nm and error of 120 nm.•The proposed method would be applied to on-machine calibration effectively.
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关键词
On-machine calibration,Rotation stage,Angular position error,Runout,Absolute position sensor
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