Flat Piezoelectric Traveling Wave Ultrasonic Micromotor With Flexible Support Structure

This paper presents a traveling wave type ultrasonic micromotor based on lead zirconate titanate (PZT). The design of flat structure and flexible support helps to miniaturize the ultrasonic micromotor. The piezoelectric actuation and traveling wave driving satisfy the requirements of the ultrasonic micromotor for large driving capability. Wafer-level MEMS process is conducted in fabrication of the ultrasonic micromotor. Experiments reveal that the ultrasonic micromotor operates at 100.1 kHz with a maximum speed of 3400 rpm. The ultrasonic micromotor has the advantage of miniaturization and feasible integration.