A Silicon Carbide 256 Pixel UV Image Sensor Array Operating at 400 oC

Shuoben Hou,Muhammad Shakir,Per-Erik Hellstrom,Bengt Gunnar Malm,Carl-Mikael Zetterling,Mikael Ostling

IEEE Journal of the Electron Devices Society（2020）

引用 8|浏览55

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摘要

An image sensor based on wide band gap silicon carbide (SiC) has the merits of high temperature operation and ultraviolet (UV) detection. To realize a SiC-based image sensor the challenge of opto-electronic on-chip integration of SiC photodetectors and digital electronic circuits must be addressed. Here, we demonstrate a novel SiC image sensor based on our in-house bipolar technology. The sensing ...

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关键词

Image sensors,Silicon carbide,Temperature sensors,Photodiodes,Sensor arrays,Transistors,Light emitting diodes

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