Self-Powered Autonomous Wireless Sensor Node by Using Silicon-Based 3D Thermoelectric Energy Generator for Environmental Monitoring Application

In this paper, we present the results of a preliminary study on the self-powered autonomous wireless sensor node by using thermoelectric energy generator based on Silicon (Si) thermoelectric legs, energy management integrated circuit (EMIC), Radio Frequency (RF) module with a temperature and humidity sensor, etc. A novel thermoelectric module structure is designed as an energy generator module, which consists of 127 pairs of Silicon legs and this module is fabricated and tested to demonstrate the feasibility of generating electrical power under the temperature gradient of 70K. EMIC has three key features besides high efficiency, which are maximum power point tracking (MPPT), cold start, and complete self-power operation. EMIC achieved a cold start voltage of 200 mV, peak efficiency of 78.7%, MPPT efficiency 99.4%, and an output power of 34 mW through only the Thermoelectric Generator (TEG) source. To assess the capability of the device as a small scale power source for internet of things (IoT) service, we also tested energy conversion and storage experiments. Finally, the proposed sensor node system which can transmit and monitor the information from the temperature and humidity sensor through the RF module in real time demonstrates the feasibility for variable applications.