Quantum dot-based optically pumped VCSELs with high-contrast periodic gratings

Tibor Fordos,Edmund Clarke,Pallavi Patil,Robert J. Airey,Nasser Babazadeh,Benjamin Cemlyn,Mike Adams,Ian Henning,Jon Heffernan

2019 24th Microoptics Conference (MOC)（2019）

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摘要

We present our recent results on quantum dot-based VCSELs for O-band telecoms applications. The incorporation of Sirich SiN _x /SiO ₂ distributed Bragg mirrors, which have been studied by spectroscopic ellipsometry, as well as using high-contrast SiN _x 1D gratings will lead to a significant size reduction desirable for the fabrication.

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关键词

optically pumped VCSELs,high-contrast periodic gratings,quantum dot-based VCSELs,O-band telecoms applications,spectroscopic ellipsometry,Si-rich SiNx-SiO2 distributed Bragg mirrors,high-contrast SiNx 1D gratings,size reduction,SiNx-SiO2

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