High Volume Electrical Characterization of Semiconductor Qubits

international electron devices meeting(2019)

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摘要
Perhaps the greatest challenge facing quantum computing hardware development is the lack of a high throughput electrical characterization infrastructure at the cryogenic temperatures required for qubit measurements. In this article, we discuss our efforts to develop such a line to guide 300mm spin qubit process development. This includes (i) working with our supply chain to create the required cryogenic high volume testing ecosystem, (ii) driving full wafer cryogenic testing for both transistor and quantum dot statistics, and (iii) utilizing this line to develop a quantum dot process resulting in key electrical data comparable to that from leading devices in literature, but with unprecedented yield and reproducibility.
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关键词
quantum computing hardware development,high throughput electrical characterization infrastructure,cryogenic temperatures,qubit measurements,supply chain,wafer cryogenic testing,transistor,quantum dot statistics,quantum dot process,electrical data,cryogenic high volume testing ecosystem,spin qubit process development
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