Categorization and structure analysis of pits generated during GaN growth on Si substrates

Kazuya Okamoto, Takumi Soga,Momoko Deura,Takashi Yoda, Hideshi Takahashi, Yasushi Iyechika, K. Miyano, Masayuki Tsukui,Takeshi Momose,Masakazu Sugiyama,Yukihiro Shimogaki

The Japan Society of Applied Physics(2020)

引用 23|浏览21
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gan growth,analysis
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