Metasurface Beam Deflector Array on a 12-inch Glass Wafer

Nanxi Li,Yuan Hsing Fu,Yuan Dong,Ting Hu,Zhengji Xu,Qize Zhong,Dongdong Li,Yanyan Zhou,Keng Heng Lai,Vladimir Bliznetsov, Hou-Jang Lee, Wei Loong Loh,Shiyang Zhu,Qunying Lin,Navab Singh

OFC（2020）

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摘要

We have demonstrated a large-area metasurface beam deflector array patterned directly on a 12-inch glass wafer using immersion lithography. The captured random points at 940 nm wavelength show a good match with the design.

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关键词

glass wafer,large-area metasurface beam deflector array,immersion lithography,wavelength 940.0 nm,size 12 in

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