Thermal Strain Analysis on High-Temperature-Annealed Sputtered AlNYusuke Hayashi,Kenjiro Uesugi,Kanako Shojiki,Hideto Miyake,Tetsuya Tohei,Akira SakaiThe Japan Society of Applied Physics(2020)引用 22|浏览21暂无评分AI 理解论文溯源树样例生成溯源树,研究论文发展脉络Chat Paper正在生成论文摘要