PZT/epoxy multi-composites for ultrasonic transducer applications
2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF)(2019)
摘要
High quality ultrasonic transducers require high sensitivity and broad bandwidth to achieve high contrast and high spatial resolution ultrasonic imaging. PZT/epoxy multi-composites transducers were proposed, which facilitated high sensitivity and broad bandwidth. The design of the PZT/epoxy multi-composites were guided by W.A. Smith for high sensitivity. Finite element analysis based PZFlex simulation was utilized to predict the performances. The PZT/epoxy multi-composites were fabricated using a modified dice and fill method. 5MHz transducers were fabricated using the PZT/epoxy multi-composites and two types PZT/epoxy 1–3 composites with the same fabrication process. Electrical and acoustic properties of the transducers were characterized systematically. We determined that the PZT/epoxy multi-composites transducers have a little larger center frequency(5.03 MHz), similar −6 dB bandwidth(40.6%) and a much higher peak-to-peak voltage(166.18mV) compared to large pitch PZT/epoxy 1–3 composites transducers (4.605 MHz, 38.9%, and 98.74mV, respectively) and small pitch PZT/epoxy 1–3 composites transducers (4.695 MHz, 46.6%, and 88.2mV, respectively). These results suggest that PZT/epoxy multi-composites have great potential in ultrasonic transducer applications. A theory was proposed to approximate the sensitivity at last, which has potential in guiding the design of M type transducers.
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关键词
multi-composites,ultrasonic transducer,theoretical computation,PZFlex simulation
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