Simplified Process for the Monolithic Integration of Tunnel Magnetoresistive Sensors in a Two-Dimensional Magnetometer

We present the fabrication process and characterization of a tunnel magnetoresistance sensor-based monolithic device assembled in Wheatstone bridge architecture, capable of measuring magnetic fields in both planar-sensitive directions simultaneously. This process is simplified in comparison with other fabrication strategies, as it does not require annealing or the usage of auxiliary structures to ...