An Infrared Chemical Sensor Based on Plasmonic enhanced Bulk Acoustic Wave Resonator Array

This letter reports a multi-spectral infrared chemical sensor based on a virtual array of bulk acoustic wave resonators with different frequencies. The plasmonic metasurfaces with different patterns on the top surface of resonators provide high IR absorption without degradation of resonating performance. The metasurfaces enhance the frequency responses of the resonant sensor to the specific infrar...