Atomic layer deposition as a tool of Surface engineering

The applications of nanostructured materials are close related to their shape and properties. A comprehensive understanding of the properties modification by controlling the material size, thickness or shape is of key importance. A nanostructure can become a building block to create the upcoming nano-technological stages, where the final characteristics of devices can be fine-tuned from design. In this report it is shown that several physicochemical properties, such as refractive index, band gap or thermal resistance can be modified in a controlled fashion. ALD is a very versatile fabrication technique for building nanotubes (Al2O3 and TiO2), nanolaminates (Al2O3-ZnO, Y2O3-ZrO2 and ZrO2TiO2) and core-shell materials (diamond-Al2O3) with an exquisite precision on the thickness of the coatings.