Excimer Laser Annealing of sol-gel Metal-Oxide thin films
semanticscholar(2019)
摘要
Over the last decade, large area electronics manufacturing has become an emerging yet challenging field of interest, with flexible transparent devices drawing the attention of the scientific community as well as the industrial sector. A major factor to this development has been the transition from conventional vacuum deposition techniques to a novel, solution process-scheme which enabled the realization of a plethora of state-of-the-art applications (sensing technologies, integrated smart systems, wearables, lighting and printed displays) employing large area manufacturing approaches (i.e. roll-to-roll).
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